Product Feature
- Directly integrate to the machine on assembly lines
- Automatically analyze the multi-channel 24-7
- Real-time return valid data
- In-line monitor micro-/nano-particle counts
- Effectively monitor water quality and treatment tank
- Enhance the efficiency of the cleaning process
Advantage
Product Defect Calculation
Provide alarm upon detecting micro-/nano-particle contamination. Filter elements could be replaced beforehand to maintain high-quality products if particle counts exceed the standard level.
Performance Optimization
Cross-refer the size, lifespan, and maintenance intervals of filter elements; monitor the contamination levels in the manufacturing process, and offer optimized recommendations.
Ensure Water Quality Standards
Ensure the cleanliness of the manufacturing equipment meets specifications and clients’ demands.
半導體全產業應用
晶圓製造
封裝測試
產品優勢
- 一機多點位切換
- 自動化微奈米子即時監控
- 比對良率 & 污染物關係
- 彈性檢測排程自動預警
產品應用
- 水洗製程（DI WATER）
- 蝕刻製程（金屬蝕刻液）
- 脫膜製程 （剝膜液、脫膜劑）
- 微影製程 （銅酸、鋁酸）
導入客戶
- 台灣知名半導體封裝廠
- 晶圓製造廠
- 台灣面板大廠
Specification
| 量測範圍 | 0.1 μm - 50 μm |
|---|---|
| 可容許誤差範圍 | 40000 counts/ml @ 5% Coincidence Error |
| 校正 | 追溯至NIST |
| 通訊模式 | RS485/Modbus, 4~20 mA |
| 外箱 / 管路 / 取樣介面 | 不銹鋼 / PFA / 石英 |
| LED燈指示 | 電源 / 故障 / 正常取樣 / 異常警告 |
| 取樣溫度 / 壓力 | 0-70 °C / 150 PSI |
